| TYPE OF PRODUCT |
APPLICATION |
MODEL or P/N |
DESCRIPTION |
| RF Matching Network |
AMAT Phase IV |
| MXP |
0010-09416 |
Assembly RF Match Etch[Rev. R] |
| MXP+ |
0010-36162 |
Oxide RF Match |
| CVD |
0010-09750 |
Assembly RF Match CVD[Rev. K] |
| PVD Preclean |
0010-20524 |
Assembly 200mm RF Match Modified[Rev. 002] |
| 0010-20525 |
Assembly 150mm RF Match Modified[Rev. 001] |
| DPS Bias |
0010-36408 |
Assembly B49 RF MatchDPS Chamber |
| 0010-36114 |
|
| AMAT High Efficiency |
| PVD |
0010-01929 |
Assembly RF Match Biased Electrode BESC[Rev. 004] |
| 0010-02977 |
Assembly RF Match, Sub Zero BESC[Rev. 006] |
| 0010-22161 |
Assembly High Efficiency RF Match, HTESC PH1 [Rev. 001] |
| 0010-22225 |
Assembly, 200mm RF Match High Efficiency[Rev. A] |
| Bias |
0010-02372 |
Assembly High Efficiency RF Match Biased W/Filter PCB[Rev. 004] |
| 0010-13627 |
Assembly High Efficiency RF Match Biased[Rev. 002] |
| 0010-21748 |
Assembly RF Match 300mm Preclean/RPC PVD[Rev. 007] |
| H.E |
0010-30686 |
Assembly RF Match, Metal ALD 300mm[Rev. 003] |
| DAIHEN |
RMN-50M2 |
|
